ASTM F2405-2004 使用高质量分辨率辉光放电质谱仪测量高纯度铜中痕量金属杂质的标准试验方法

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【英文标准名称】:StandardTestMethodforTraceMetallicImpuritiesinHighPurityCopperbyHigh-Mass-ResolutionGlowDischargeMassSpectrometer
【原文标准名称】:使用高质量分辨率辉光放电质谱仪测量高纯度铜中痕量金属杂质的标准试验方法
【标准号】:ASTMF2405-2004
【标准状态】:现行
【国别】:
【发布日期】:2004
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.17
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:铜;质量(物质);痕量元素;金属的;杂质;辉光放电;分辨率;高纯度;质谱学;分光计
【英文主题词】:copper;electronics;glowdischargemassspectrometer(GDMS);purityanalysis;sputteringtarget;tracemetallicimpurities
【摘要】:1.1Thistestmethodcoverstheconcentrationsoftracemetallicimpuritiesinhighpurity(99.95wt.%pure,orpurer,withrespecttometallictraceimpurities)electronicgradecopper.1.2Thistestmethodpertainstoanalysisbymagnetic-sectorglowdischargemassspectrometer(GDMS).1.3ThistestmethoddoesnotincludealltheinformationneededtocompleteGDMSanalyses.Sophisticatedcomputer-controlledlaboratoryequipment,skillfullyusedbyanexperiencedoperator,isrequiredtoachievetherequiredsensitivity.Thistestmethoddoescovertheparticularfactors(forexample,specimenpreparation,settingofrelativesensitivityfactors,determinationofdetectionlimits,andthelike)knownbytheresponsibletechnicalcommitteetoeffectthereliabilityofhighpuritycopperanalyses.1.4Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:H13
【国际标准分类号】:77_120_30
【页数】:5P.;A4
【正文语种】: